大為股份(002213.SZ):取得發明專利證書及商標註冊證書
格隆匯2月18日丨大為股份(002213.SZ)公佈,近日,公司收到國家知識產權局頒發的10項《商標註冊證》,公司全資子公司深圳市芯匯羣微電子技術有限公司(“芯匯羣”)收到國家知識產權局頒發的1項《發明專利證書》、3項《商標註冊證》。
該發明公開一種基於卷積神經網絡的晶圓缺陷檢測方法,可以提高晶圓缺陷檢測效率,該檢測方法包括獲取基於卷積神經網絡的缺陷檢測模型並保存;獲取圖像採集設備採集的晶圓圖像,並進行加權均值濾波處理,將處理後的晶圓圖像並輸入至所述缺陷檢測模型;所述加權均值濾波處理包括以晶圓圖像的每一個像素點為中心像素點,選取預設大小的濾波窗口,濾除濾波窗口內的極大值像素點和極小值像素點,獲取剩餘像素點的均值像素值及各個剩餘像素點的權值,並進行歸一化處理,對各個剩餘像素點的像素值與對應權值進行加權求和,得到的像素值作為所述濾波窗口內中心像素點的濾波後的像素值;利用所述缺陷檢測模型檢測所述晶圓圖像的缺陷的類型。
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